ASCENT Theme 1(B) Liaison Meeting / Update on Selective Thermal ALD and Selective Passivation for Metal, Silicide, and Barrier Deposition
Andrew Kummel (UCSD) will give an update on Selective Thermal ALD and Selective Passivation for Metal, Silicide, and Barrier Deposition.
Please refer to the presentation from Prof. Kummel on 3/26/19 for a preview.
This meeting is only available to the JUMP research community, such as Principal Investigators, Postdoc researchers, Students, and Industry/Government liaisons.