ASCENT Theme 1(B) ALD Chemistry

Theme 1B ALD Chemistry

Adam Hock: Novel precursors for oxide semiconductors and TMD repair;
Steve George: Electron enhanced ALD of metals and barriers;
Andy Kummel: Low-temperature deposition of crystalline AlN

This meeting is only available to the JUMP research community, such as Principal Investigators, Postdoc researchers, Students, and Industry/Government liaisons.