ASCENT Theme 1B Liaison Meeting /Update on ALD Research in ASCENT

Theme1B Update on ALD Research in ASCENT (Repeat presentation)

Presenters: Andrew Kummel (UCSD), Charles Winter(Wayne State), Adam Hock (IIT), KJ Cho (UT Dallas), Steven George (Colorado-Boulder)

Topics will include  (a) New Ti precursors for Ti metal, TiSix and TiN, (b) Selective Ru ALD for vias and AlN ALD for heat spreaders, (c) Modeling of Selective Ru ALD and antiferroelectric ZrO2, (d) Electron stimulated ALD for bottom up fill, (e) Novel precursors for ALD of semiconducting oxides.

This meeting is only available to the JUMP research community, such as Principal Investigators, Postdoc researchers, Students, and Industry/Government liaisons.